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对集成电路的制程来说,粒径为线宽尺寸一半的灰尘能导致产品致命的缺陷。 Air filtration in the electronics industry For integrated circuit manufacturing, dust with a particle size half the line width can cause fatal defects in the product. Therefore, dust larger than or equal to this particle diameter is called "lethal dust", and its maximum allowable concentration is listed in the left table.
Detailed introduction

For integrated circuit manufacturing, dust with a particle size that is half the line width can cause fatal defects in the product. Therefore, dust larger than or equal to this particle diameter is called "lethal dust", and its maximum allowable concentration is listed in the left table. Today's cutting-edge technology has required the average concentration of lethal dust to be less than 1 / m3.
At present, integrated circuit manufacturing based on 0.25um ~ 0.18um technology is popular worldwide. Existing air filtration products and technologies can provide perfect solutions for manufacturing technologies above 130nm. For processes below 90nm, microelectronics and air filtration industry experts are actively developing related technologies to make them more mature and even standardized and commercialized.
In the clean room, in addition to the dust pollutants we have already known, molecular-level gaseous pollutants have become the focus of pollution control in just a few years with the rapid increase in process sensitivity.
In the microelectronics manufacturing industry, chemical substances carried in the air that can harm production processes and products and cause yield loss or related losses are called "molecular-level pollutants" (AMC).
Source of AMC
The sources of AMC are "rich" and extensive. Examples of known sources:
Hundreds of volatile / gas chemicals used in microelectronics processes;
Chemicals released from the body of people inside the room, such as ammonia;
Clean room construction materials (including adhesives, fire-resistant coatings, topcoats, etc.) and gases emitted from the machine and its auxiliary structures, such as filters, ceilings, floors, appliances, production equipment, etc.
Fresh air introduced by MAU, namely outdoor pollution, such as sulfur dioxide, nitrogen oxides, ozone, ammonia, organic gases, metal ions, etc. It is mainly affected by surrounding vehicle exhaust, industrial and agricultural, power generation and heating equipment.
Hundreds of volatile / gas chemicals used in microelectronics processes;

Beichang Junkong (Beijing) Technology Co., Ltd. Address: Laoxiuwan Industrial Park, Shahe Town, Changping District, Beijing, 102206, China Fax: 010-80725288

高效过滤器 、高温高效空气过滤器、初效过滤器、中效过滤器、HEPA高效空气过滤器、初中高效过滤棉等。 Keywords: Beichang Junkong specializes in the production of high-efficiency filters , high-temperature high-efficiency air filters, primary efficiency filters, intermediate efficiency filters, HEPA high-efficiency air filters, and junior high-efficiency filter cotton. Factory price direct sales provide free technical support, phone 13260183782

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